Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors

N. Krátká; N. Neykova; A Kromka; B. Rezek

Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors

N. Krátká; N. Neykova; A Kromka; B. Rezek

Acta Universitatis Carolinae. Mathematica et Physica (2012)

Volume: 053, Issue: 2, page 97-103
ISSN: 0001-7140

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Krátká, N., et al. "Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors." Acta Universitatis Carolinae. Mathematica et Physica 053.2 (2012): 97-103. <http://eudml.org/doc/261188>.

@article{Krátká2012,
author = {Krátká, N., Neykova, N., Kromka, A, Rezek, B.},
journal = {Acta Universitatis Carolinae. Mathematica et Physica},
language = {eng},
number = {2},
pages = {97-103},
publisher = {Charles University in Prague},
title = {Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors},
url = {http://eudml.org/doc/261188},
volume = {053},
year = {2012},
}

TY - JOUR
AU - Krátká, N.
AU - Neykova, N.
AU - Kromka, A
AU - Rezek, B.
TI - Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors
JO - Acta Universitatis Carolinae. Mathematica et Physica
PY - 2012
PB - Charles University in Prague
VL - 053
IS - 2
SP - 97
EP - 103
LA - eng
UR - http://eudml.org/doc/261188
ER -

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